Thank you so much for your detailed explanation.
I’m not certain that my traps are homogeneously distributed in my sample.
However, I think that the distribution is basically homogeneous since the specimen is not treated in any way that would cause damage before plasma implantation.
On the other hand, I think the fact that defects (blistering) were created during plasma implantation needs to be take into the simulation.
Now, I have rewritten the code to reflect your comments.
The rewritten contents are,
- The temperature evolution is matched to that of the experiment.
- I have restricted the density of Trap2 to near the surface (<10e-6). I think this area has a blistering effect from FIB-SEM images of the reference sample.
As a result, the following spectra were obtained.
The position of the peak was aligned with the reference.

this work does not take into account the time evolution of defects due to plasma irradiation.
So in the next step, I would try to do this.